Influence of Channel and Gate Engineering on the Analog and RF Performance of DG MOSFETs

Abstract

The design of analog and RF circuits in CMOS technology has become increasingly more difficult as device modeling faces new challenges in the deep-submicrometer regime and emerging circuit applications. In this paper, we investigate the influence of both channel and gate engineering on the analog and RF performances of double-gate (DG) MOSFETs for system-on-chip applications. The gate engineering technique used here is the dual-metal gate technology, and the channel engineering technique is the conventional halo doping process. For analog applications, importance is given to the subthreshold regime as CMOS circuits operated in this regime are very much attractive for ultralow-power high-gain performances. Gate- and channel-engineered devices show an increase of gain by 45% and 35%, respectively, compared with the single-metal DG MOSFET. The gate-engineered device shows an improvement of 21.6% and 20% in the case of f <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">T</sub> and f <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">MAX</sub> values, whereas the channel-engineered device exhibits a reduction of f <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">T</sub> by 2.7% with nearly equal f <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">MAX</sub> .