Abstract
We report an investigation of a high-pressure molecular fluorine laser operating at 158 nm. Several cavity configurations were studied, including one employing a roof prism as the high reflector. A maximum VUV pulse energy of 237 mJ, corresponding to a specific output of 3.3 J/1 was obtained when the laser was operated as a double-ended device. With single-ended operation the largest output energy was 176 mJ at a specific output of 2.5 J/1.
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