Abstract
Cr-B-N coatings with different boron contents were deposited on Si(1 0 0) wafers and 316L stainless steels using unbalanced magnetron sputtering system by way of adjusting the CrB2 target currents. The microstructure and mechanical properties of Cr-B-N coatings were investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), white light interferometric three dimensional profilometer and nano-indentation tester, respectively. The tribological properties of Cr-B-N/SiC tribopairs in water were studied using ball-on-disk tribometer. The results showed that the Cr-B-N coatings showed a fine nanocomposite structure consisted of CrN nanograins and amorphous BN phase regardless of boron contents, and the typical columnar structure became featureless with increasing the CrB2 target current. The hardness and reduced elastic modulus first increased to 28.9GPa and 330GPa at the CrB2 target current of 2A, and then decreased gradually with further increasing the CrB2 target current to 4A. As compared with the CrN/SiC tribopairs, the lowest friction coefficient of Cr-B-N/SiC ball tribopairs in water was 0.15, and the wear resistance of Cr-B-N coatings was effectively enhanced.
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