Abstract
Particle-in-cell/Monte Carlo (PIC/MC) simulations were performed for radio frequency (RF) planar magnetron discharges of pure argon gas and an O/sub 2/-Ar gas mixture. The number densities of Ar/sup +/ and O/sup -/ ions drastically increased when oxygen was added to the Ar discharge gas. Moreover, the spatial distributions of positive ions, Ar/sup +/, O/sub 2//sup +/, and O/sup +/, had two peaks in the O/sub 2//Ar mixture discharge. The positive ions were distributed in such a way that the charge neutrality was kept in the plasma bulk, indicating that the behavior of Ar/sup +/ ions is influenced by the existence of O/sup -/ions. The mechanism of this phenomenon is clearly explained by visualizing results of the simulation.
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