Abstract
Fe/Ti multilayered films prepared by plasma-free sputtering revealed high coercivity. The effect of elevating substrate temperature and adding Zr and Cr into Fe and Ti layers, respectively, have been examined to increase the coercivity Hc. The elevation of substrate temperature to 200–400 °C did not bring a significant increase in Hc. Addition of Zr into Fe layers caused a soft magnetism because of the small Fe grain size. On the other hand, addition of Cr into Ti layers revealed a significant increase in Hc especially for the films with small Fe thickness lFe. Although the magnetization of Fe/Ti multilayered films with lFe of about 16 Å was almost zero, that of Fe layers in Fe/Ti90Cr10 multilayered films was as large as 14 kG with a high Hc of about 400 Oe. X-ray diffractometry (XRD) implies that the small Fe grain size and the magnetic interaction between atoms at the interface may be one of the origins of such high Hc.
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