Abstract
ASTRACT Coherent Gradient Sensing is a full-field optical technique that produces real-time images of macroscopic wafer curvature that, for thin films, can be related to stress through Stoney's equation. Here we descrie the use of CGS as an in situ diagnostic to oserve film stress during chemical vapor deposition. We discuss the oserved changes in wafer curvature as a thin film of PTiO3 is deposited by chemical vapor deposition on single crystal MgO, cooled to room temperature, and then thermally cycled.
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