In Situ Characterisation of Polymer Surfaces and Thin Organic Films in Plasma Processing

Abstract

AbstractIn situ sampling techniques are presented for investigation of plasma surface modification of polymers and plasma polymerisation. FTIR spectroscopy (infrared absorption reflection spectroscopy ‐ IRRAS, and attenuated total reflection ‐ ATR) are properly used for characterisation of the changes in the molecular structure of thin polymer films (polystyrene, polyethylene) due to low pressure plasma treatment. The thin films were prepared by dip or spin coating procedures. In the case of plasma polymerisation a novel fibre‐ATR technique is applied to investigate the plasma polymerisation process in the plasma bulk. Results are exemplary shown for plasma polymerisation of styrene. Ellipsometric measurements allowed the characterisation of the thin plasma modified top polymer surface layer or thin deposited plasma polymer films by their refractive index and thickness. It was shown that the applied surface plasmon ellipsometry is very sensitive with respect to the usual ellipsometry for investigation of polymer surface modification. The in situ microgravimetry by means of electronic vacuum microbalance permitted to measure the change of the sample mass in the order of 1 μg during the plasma treatment. The first steps in plasma modification (concurrence between the incorporation of plasma particles and the material etching) were studied.