Abstract
The in-plane dielectric and ferroelectric properties of preferentially oriented lead zirconate titanate (PZT) thin films are characterized using interdigitated transducers (IDTs). By combining finite element method simulations and capacitance measurements, values of the dielectric constant of films with thicknesses between 150 nm and 800 nm are obtained. A modified Sawyer–Tower circuit is used to investigate the polarization loops measured in-plane using IDT electrodes. A well-defined hysteresis loop is obtained demonstrating the switching of the polarization of the ferroelectric domains. Leakage current measurements reveal high resistivity and are an indication of the high quality of the PZT film. The obtained characteristics are used to determine the total impedance of the IDT-PZT structure. Here, the structure is represented by an equivalent ladder circuit using the inductance and resistance of the IDT electrodes and the capacitance and conductance of the PZT film. The obtained total impedance matches low frequency measurements.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
