Abstract
The annealing conditions that favor the formation of RFe2 phase in amorphous Terfenol-D films include preventing preferential Tb loss during annealing and a narrow annealing temperature window around 600 °C. The amorphous Terfenol films were obtained by magnetron sputter deposition using alloy targets on glass, Si and Terbium substrates. Use of Tb substrate provided a nearly stress free film after annealing due to a good thermal expansion match. The presence of magnetic field (2000 Oe) parallel to the film plane during annealing of samples on Tb substrates promotes in-plane orientation of {220} planes of RFe2 phase indicating preferred in-plane orientation of 〈111〉 directions.
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