Abstract

Self-organized growth of InGaAs/GaAs strained epitaxial layers gives rise to an ordered array of islands via the Stranski-Krastanow growth mode, for misfits >1.8%. These islands are pyramidal in shape with a base diagonal of /spl sim/20 nm and height of /spl sim/6-7 nm, depending of growth parameters. They therefore exhibit electronic properties of zero-dimensional systems, or quantum dots. One or more layers of such quantum dots can be stacked and vertically coupled to form the gain region of lasers. We have investigated the properties of such single-layer quantum dot (SLQD) and multilayer quantum dot (MLQD) lasers with a variety of measurements, including some at cryogenic temperatures. The experiments have been complemented with theoretical calculations of the electronic properties and carrier scattering phenomena in the dots. Our objective has been to elucidate the intrinsic behavior of these devices. The lasers exhibit temperature independent threshold currents up to 85 K, with T/sub 0//spl les/670 K. Typical threshold currents of 200-/spl mu/m long room temperature lasers vary from 6 to 20 mA. The small-signal modulation bandwidths of ridge waveguide lasers are 5-7.5 GHz at 300 K and increased to >20 GHz at 80 K. These bandwidths agree well with electron capture times of /spl sim/30 ps determined from high-frequency laser impedance measurements at 300 K and relaxation times of /spl sim/8 ps measured at 18 K by differential transmission pump-probe experiments. From the calculated results we believe that electron-hole scattering intrinsically limits the high-speed performance of these devices, in spite of differential gains as high as /spl sim/7/spl times/10/sup -14/ cm/sup 2/ at room temperature.

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