Abstract
The improvement of attosecond pulse reflection by large angle incidence for a periodic multilayer mirror in the extreme ultraviolet region has been discussed. Numerical simulations of both spectral and temporal reflection characteristics of periodic multilayer mirrors under various incident angles have been analyzed and compared. It was found that the periodic multilayer mirror under a larger incidence angle can provide not only higher integrated reflectivity but also a broader reflection band with negligible dispersion, making it possible to obtain better a reflected pulse that has a higher pulse reflection efficiency and shorter pulse duration for attosecond pulse reflection. In addition, by increasing the incident angle, the promotion of attosecond pulse reflection capability has been proven for periodic multilayer mirrors with arbitrary layers.
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