Abstract
Ion beam finishing techniques of aluminium mirrors have a high potential to meet the increasing demands on applications of high-performance mirror devices for visible and ultraviolet spectral range. Reactively driven ion beam machining using oxygen and nitrogen gases enables the direct figure error correction up to 1 μm machining depth while preserving the initial roughness. However, the periodic turning mark structures, which result from preliminary device shaping by single-point diamond turning, often limit the applicability of mirror surfaces in the short-periodic spectral range. Ion beam planarization with the aid of a sacrificial layer is a promising process route for surface smoothing, resulting in successfully reduction of the turning mark structures. A combination with direct surface smoothing to perform a subsequent improvement of the microroughness is presented with a special focus on roughness evolution, chemical composition, and optical surface properties. As a result, an ion beam based process route is suggested, which allows almost to recover the reflective properties and an increased long-term stability of smoothed aluminium surfaces.
Highlights
Aluminium is a common construction material for fabrication of high-performance mirror devices since it exhibits high reflection coefficient in a broad spectral wavelength range from the infrared (IR) to the ultraviolet (UV) [1]
Reactive ion beam etching with nitrogen Direct N2 RIBE machining is performed on a rapidly solidified aluminium (RSA) Al905 sample with machining depths up to 2000 nm
An improvement of the surface topography was found for the turning mark features, which are smoothed out to some extent during ion beam machining
Summary
Aluminium is a common construction material for fabrication of high-performance mirror devices since it exhibits high reflection coefficient in a broad spectral wavelength range from the infrared (IR) to the ultraviolet (UV) [1]. During ion beam processing with nitrogen an aluminium nitride layer is formed, which is accompanied by an increased microroughness and reduced reflectivity properties of the optical surface [21].
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More From: Journal of the European Optical Society-Rapid Publications
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