Abstract
Superconducting-tunnel-junction (STJ) array detectors have exhibited excellent characteristics for fluorescence-yield x-ray absorption fine structure (XAFS) for trace light elements in structural and functional materials. For XAFS, we have developed new fabrication processes for close-packed STJ pixels by using a three-dimensional structure (3D-STJ), in which the layers of STJ pixels are formed after caldera planarization of the base SiO2 layer deposited on the patterned wiring leads. The 3D-STJ has an operation yield of 88% and a mean energy resolution of 23.8 +/−1.9 eV for the C-Kα x-ray.
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