Improvement of Heat and Mass Transfer Performance in a Polysilicon Chemical Vapor Deposition Reactor with Field Synergy Principle

Abstract

Abstract In this paper, two-dimensional numerical model has been established to investigate the convective heat and mass transfer performance in the silicon CVD process. Wave-like and trapezoid-like obstacles are introduced to enhance the interruption within the fluid flow. The dimensionless criterions Nu and Sh are obtained to measure the heat and mass transfer performance. In addition, the field synergy principle is applied to reveal the relationship between the synergy degree of multiple physical fields (velocity vector, temperature gradient and concentration gradient of multiple components) and heat and mass transfer performance. The numerical results show that, compared to conventional straight channel, the novel channels increase the Nu and Sh , reduce the synergy angle between the velocity vector and temperature gradient, as well as the velocity vector and the concentration gradient of six main components. In brief, the two improved flow channels have a better convective heat and mass transfer performance.