Abstract

The improvements of a soft x-ray microscope beamline (BL-12) at the SR center of Ritsumeikan University are reported. A wedge-shaped slit and Si plane mirror were newly introduced. The better energy resolution was expected and the +2nd order diffraction from the CZP (1.2 nm at 2.4 nm observation) was suppressed. A new sample holding fixture allows the sample to be replaced quickly and accurately. A new sample cooling system allowed a stable cryogenic x-ray imaging.

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