Abstract
We report on results of high precision straightness measurements of a graduated scale and a comparison of two different error separation methods. One approach is based on the Traceable Multi-Sensor method. For this purpose, a sensor element consisting of three heterodyne interferometers was integrated at PTB's length reference comparator to measure the straightness deviation of structures on scales. For a scale with a grating of 322 mm length a standard uncertainty below 1.5nm was achieved using this method. A comparison with another method based on reversal technique was realized and revealed a difference below 2.5nm (PV) between both results.
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