Abstract
A non-destructive measurement system for the inspection of magnetic force microscopy (MFM) probes was implemented and discussed in this paper. Its operating system was similar to that used in standard AFM/MFM machines. The MFM probe under test was held on a sample holder and was oscillated by a piezoelectric transducer. The oscillation of the MFM probe was measured by an optical beam deflection technique. In order to measure a response of the MFM probe under the presence of magnetic fields, a solenoid coil was employed as a source for generating the out-of-plane magnetic field. This avoids physical contact which may damage the MFM probe. Different types of MFM probes, including commercial probes and developed in-house probes with different coating thicknesses, were used to demonstrate the system. Experiments revealed a promising result and showed the dependence of the probe sensitivity on the coating thicknesses.
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