Abstract
Modeling and measurement results of the RF input impedance of a helical resonator discharge are given. A simple microstrip transmission line model is used to extract an equivalent circuit of a helical resonator discharge. The transmission line model consists of a grounded cylinder for RF shielding, a helical copper coil for RF heating, and a high density plasma. Transmission line parameters for an experimental helical resonator discharge chamber are extracted, and the results are compared with the measured results. The measured transmission line parameters for the experimental reactor are the characteristic impedance of 200 /spl Omega/, the attenuation constant of 6/spl times/10/sup -3/ Np/m, and the wave number of 0.36 rad/m, which have good agreement with the calculated values.
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