Abstract
In this paper, a high performance CeTixOy sensing film was developed by using a simple sol-gel spin-coating method for an electrolyte-insulator-semiconductor (EIS) pH sensor. The crystal structures, surface morphologies, and chemical compositions of the CeTixOy films prepared under different titanium concentrations (0.1, 0.3 and 0.5 M) were explored using a combination of X-ray diffraction, atomic force microscopy, and X-ray photoelectron spectroscopy, respectively. The structural properties of the CeTixOy membranes were associated with the sensing performances of their EIS pH sensors. The CeTixOy sensing film fabricated at the 0.3 M condition exhibited the best sensing characteristics (pH sensitivity, hysteresis voltage and drift rate) among these conditions. We attribute this behavior to the optimal titanium content in the film forming the stoichiometric Ce2TiO5 structure, enhancing the surface roughness CeTixOy film, and increasing the Ce3+/Ce4+ ratio. Figure 1
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