Abstract
A complete strategy to manage dummy fills inside a large spectrum of integrated RF inductors realized in an advanced thick copper RF back end of line (BEOL) is presented here. The main motivation of this paper is first to evaluate through a design of experiment (DOE) modeling, the impact on RF inductor performances of dummy metal fills inserted inside the coils, and then determine the right metal fill density to insert in order to be compliant with Digital metal density rules without degrading their electrical performances.
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