Abstract
AbstractDuring electrical measurements in a scanning electron microscope (SEM), secondary electron (SE) images often become dark or the image contrast becomes weaker. We have revealed that this phenomenon originates in the negative charging of the insulating part in an electric circuit. This charging can be caused by stray electrons, even if the insulator is not directly irradiated. The electrostatic field owing to this charge deflects SEs and reduces the intensity of detected electrons. We have demonstrated this effect by observing systematic shifts of the field of view of SE detector, which appears in SE images. This explanation is supported by a calculation of electron trajectories in the electrostatic field in the SEM chamber. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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