Abstract
This study shows a possibility of the application of a membrane-type surface stress sensor (MSS) with a Pd film to a hydrogen sensor. It was able to detect hydrogen concentrations from 5 to 40000 ppm in a nitrogen gas mixture. In the case of a conventional sensor using a hydrogen-occluding material, it is necessary to wait for a state of saturation. In contrast, the proposed method can detect hydrogen quickly by the initial rate of hydrogen absorption. The relationship between the initial absorption rate and hydrogen concentration is explained by considering the two-step reaction kinetics of hydrogen absorption into bulk Pd via Langmuir dissociative adsorption on surface.
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