Abstract
A hollow cathode ion source has been studied in order to improve the life-time of an ion source for an ion implanter. Both volatile and refractory elements are shown to be ionized using two types of discharge state of the hollow cathode namely hot and cold cathode discharge. The life-time of LaB 6 as the hot cathode is more than 150 h and the ion beam currents reach more than 10 mA cm −2 at the extraction voltage of 10 kV. For the cold cathode operation, stable currents of ∼40 to 70 μA are extracted of refractory metal ions such as W and Mo.
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