Abstract
Pellicles capable of withstanding the high beam intensity of next generation EUV scanners at the same time maintaining a EUV transmission above 90% and lifetime sufficient to produce 10 000 wafers or more represents a significant challenge from the materials point of view. In this presentation, pellicles manufactured using free-standing carbon nanotubes (CNT) films less than 20 nm thick were characterized for EUV transmission, scattering, reflectivity, mechanical properties, and capability to stand high intensity (30 W/cm2) EUV radiation in environmental conditions similar to a 600W EUV scanner. Several types of coated CNT films were also tested to increase the lifetime of the pellicles. The EUV transmissions ranged from 98% for uncoated samples to 95% for coated. Scattering up to 4.7 degrees was less than 0.1% for uncoated films and 0.2% for coated one.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
