Abstract
As a key component of electron multiplier device, a microchannel plate (MCP) can be applied in many scientific fields. Pure aluminum oxide (Al2O3) as secondary electron emission (SEE) layer were deposited in the pores of MCP via atomic layer deposition (ALD) to overcome problems such as high dark current and low lifetime which often occur on traditional MCP. In this paper, we systematically investigate the morphology, element distribution, and structure of samples by scanning electron microscopy (SEM) and energy disperse spectroscopy (EDS), respectively. Output current of different thickness of Al2O3 was studied and an optimal thickness was found. Experimental tests show that the average gain of ALD-MCP was nearly five times better than that of traditional MCP, and the ALD-MCP showed better sensitivity and longer lifetime.
Highlights
Microchannel plate (MCP) is a compact electron multiplier of high gain [1–3]
Electrons flow to the ground and the output current was measured by picoammeter
The output current of MCP is ordered by bias voltages between different electrodes
Summary
Microchannel plate (MCP) is a compact electron multiplier of high gain [1–3]. It is a key component in MCP-PMT, night vision devices, electron microscopy, X-ray framing camera, and so on [4–7]. Al2O3 as SEE material was prepared by ALD technique in the pores of MCP with 15-mm length of side.
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
