Abstract
Platinum films in the thickness range 20-500 Å have been sputtered onto sapphire substrates at different substrate temperatures . The structural properties of these films have been studied by high-resolution x-ray scattering techniques. Information about the total thickness of the film and about the surface and interface roughnesses has been determined by means of x-ray specular reflectivity measurements. The films sputtered at have shown Laue oscillations about the Pt(111) Bragg peak. The average thickness of coherently stacked lattice planes has been compared with the total film thickness , obtained from the reflectivity measurements. The epitaxial relationship between the platinum film and the sapphire substrate has been determined using in-plane x-ray diffraction. It was demonstrated that Pt epitaxial films include two in-plane orientations related by a rotation. Both anisotropic compression in the direction and anisotropic expansion in the [111] direction were observed for these films. A correlated variation of some structural parameters with the substrate temperature was found.
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