Abstract
We reported previously on measurements of absolute distance with frequency scanned interferometry (FSI) method [1, 2]. In this paper, we extend the FSI method into 2-dimensional and 3-dimensional high-precision absolute coordinate measurements using a single laser. Absolute position is determined by several related absolute distances measured simultaneously. The achieved precision on X and Y in 2- and in 3-dimensional measurements is confirmed to be below 1 μm, while the precision in Z (in 3D case) is found to be about 2 μm. The last one is limited by the accuracy of the available translational stage used in the tests. A much more powerful laser and a better real-time data acquirement system will be required in case of measurements of larger absolute distances.
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