Abstract
This paper reports a sensor that can measure blood pulse waves with high sensitivity. The sensor has a piezoresistive cantilever which is designed to measure the pressure change of an air chamber covered with a thin membrane. Since the cantilever is highly sensitive to differential pressure, it can measure the pulse waves by only placing the sensor on the skin. Moreover, because the cantilever itself is able to eliminate the static pressing force physically, the effect of the pressing force on the measurement result is small. Finally, we demonstrate that the sensor can be used to measure pulse wave velocity (PWV).
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