Abstract
Silicon optical modulators have generated an increasing interest in the recent years, as their performances are crucial to achieve high speed optical links. Their evolutions are presented, from the first demonstrations to the latest developments on optical modulators integrated in waveguides. Among possibilities to achieve optical modulation in silicon-based materials, the carrier depletion effect has demonstrated good performances. Recent results on high speed and low loss silicon optical modulator are presented. Free carrier-concentration-variation effect is used in PIN diode. Carriers are depleted when the diode is reverse biased, leading to refractive index variations. This device presents a low capacitance which allows the reduction of RC time constant and power consumption. A Mach-Zehnder interferometer with few mm-long phase shifter is used to convert the effective index variation into intensity modulation. Performance comparison between PN, PIN and PIPIN diodes are discussed and characteristics of PIPIN diodes are presented.
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