Abstract

In this Letter, we report high-speed integrated 14 µm in diameter micro-light-emitting diode (μLED) arrays with the parallel configuration, including ${2} \times {2}$2×2, ${2} \times {3}$2×3, ${2} \times {4}$2×4, and ${2} \times {5}$2×5 arrays. The small junction area of μLED (${\sim}{191}\;\unicode{x00B5}{\rm m}^2$∼191µm2) in each element facilitates the operation of higher injection current density up to ${13}\;{{\rm kA/cm}^2}$13kA/cm2, leading to the highest modulation bandwidth of 615 MHz. The optical power of ${2} \times {5}$2×5 array monotonically increases (${\sim}{10}$∼10 times higher) as the number of arrays increases (1 to 10), while retaining the fast modulation bandwidth. A clear eye diagram up to 1 Gbps without any equalizer further shows the capability of this high-speed transmitter for VLC. These results mean that tailoring the optical power of μLEDs in a parallel-biased integrated array can further enhance the data transmission rate without degradation of the modulation bandwidth.

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