Abstract
High spatial resolution elemental maps have been demonstrated in studies of Y + implanted alumina and Al/Ti multilayer specimens using energy-filtered transmission electron microscopy. A spatial resolution of ≈2nm is achieved. Aluminum containing particles formed in Y + implanted alumina have been identified using energy-filtered images formed with plasmon energy-loss electrons. Noncrystalline aluminum containing particles in specimens implanted at lower ion energies are also observed and the image contrast can be reasonably interpreted using a compositional shell model.
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