Abstract
A resolution better than 50 nm has been achieved with a new miniaturized inductive proximity sensor. This sensor microsystem is made of a 1 mm diameter coil connected to a new and highly sensitive ASIC based on a differential relaxation oscillator. Lateral as well as axial resolutions have been characterized. A microsystem for step-motor control with an accuracy better than 2 ° is demonstrated. This application is not affected by the temperature behaviour of the sensor.
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