Abstract
In a pulsed laser plasma driven extreme ultraviolet (EUV) light, tin droplets undergo evaporation, eventually depositing on different surfaces. The removal of surface bound tin is commonly achieved with a hydrogen plasma, resulting in the formation of stannane (SnH4). The mechanisms leading to the formation and decomposition of stannane remain incompletely understood. To analyze these mechanisms mass spectrometrically, a reference is crucial, necessitating a high-resolution and thoroughly characterized mass spectrum of stannane. In this paper, a high-resolution 70 eV electron ionization (EI) mass spectrum of stannane is presented. The mass spectrum comprises all ten natural isotopes of the stannane fragments generated through EI. Utilizing the custom analysis program RASP, the relative distribution of fragments is calculated from the isotopically superimposed mass signals, offering crucial insights into the occurring processes. Furthermore, the dependence of fragment formation on ion source pressure and temperature was determined.
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