Abstract
The structure and surface morphology of aluminum and silver mirrors covered with protective dielectric oxide layer were studied by means of TEM and SEM. The presence of needle-like pores throughout the thickness of the ZrO 2 film and bubble-like pores in Al 2O 3 was observed. The test for resistivity to deuterium ion bombardment shows that the exposition to a fluence of ∼2×10 20 ions/cm 2 with the ion energy of 40–50 eV results in appearance of blisters on the surface of mirrors covered with Al 2O 3. For the mirrors protected with ZrO 2 no noticeable changes in surface morphology and reflectivity were found even after order of magnitude higher ion fluence. The effect of different porous structures on blistering phenomena is discussed.
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