Abstract
In this work Sintered Silicon Carbide (S-SiC) samples have been used to fabricate fiber-optic-coupled pressure sensors. The sensor structure reproduces a low-finesse Fabry–Perot (FP) interferometer. Laser manufacturing of cylindrical S-SiC samples was performed to define the thin membrane geometry of sensors. FP cavity is defined by the end-face of a single mode fiber and the S-SiC diaphragm surface. Hence, pressure is evaluated by measuring the cavity depth by a dedicated optoelectronic system coupled to the single mode fiber. Exploiting the excellent properties of S-SiC, in terms of high hardness, low thermal expansion, and high thermal conductivity, realized devices have been characterized up to 20 MPa. Experimental results demonstrate that produced sensors exhibit a non-linearity around ±0.6%F.S. and a high input dynamics. The all-optic sensing system proposed in this work would represent a good alternative to conventional solutions based on piezoelectric effects, overcoming the drawback related to electromagnetic interference on the acquired signals. In addition, the mechanical characteristics of S-SiC allow the use of the sensor in both automotive and aerospace hostile environments as pressure monitors in combustion engines.
Highlights
Laser material processing represents a powerful tool in the modern manufacturing industry.Laser cutting is the most common industrial application of lasers, as well as welding, drilling, and marking processes, which have reached the right maturity to be accepted as standard tools in modern industry
Several Sintered Silicon Carbide (S-Silicon Carbide (SiC)) membranes have been fabricated with thickness ranging from 100 μm to 300 μm and diameter from 2.0 to 3.5 mm
Good results have been gained for membrane diameters around
Summary
Laser material processing represents a powerful tool in the modern manufacturing industry.Laser cutting is the most common industrial application of lasers, as well as welding, drilling, and marking processes, which have reached the right maturity to be accepted as standard tools in modern industry. In recent years laser processing of materials opened new perspective in additive manufacturing and micro-fabrication [1] This trend is driven by the development of new applications as well as the increasing adoption of advanced ceramics in already established applications due to superior material and performance properties. It is worth noting that these properties are the ones that do not allow obtaining accurate geometries using conventional machining techniques in a simple, cheap, and time-effective way [2] In this context, lasers appear to be a promising technology with respect to ordinary material removal methods, because the machining operation is carried out without any contact between the laser system and the part, ensuring the elimination of cutting forces, tool wear, and machine vibration [3]. Lasers can be used for different applications, from the ablation of advanced ceramics [4], to the hardening of structural materials [5], to the joining of hybrid
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