Abstract
Progress of high-power TEA CO2 lasers is reviewed with paticular emphasis on pulse power conditioning by solid-state switching techniques. The use of the solid-state switches is a key technology forhigh-power, long-life operation because the life time of a discharge switch becomes a limiting factor of the operation life of such lasers. Another limiting factor is the degradation of the laser gas mixture. In this review, we summarize the present status of high power TEA CO2 lasers and then discuss on technical problems to be overcome for the development of high-repetition-rated TEA CO2 lasers. We also introduce two types TEA CO2 laser employing a solidstate exciter which is newly desinged and constructed for the demonstration of long-life and high-power operation.
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