Abstract
In this letter, we report the fabrication of an amorphous indium gallium zinc oxide (a-IGZO) thin-film transistor with a high-k dielectric layer on a glass substrate. The room-temperature-deposited a-IGZO channel with Ta2O5 exhibits the following operating characteristics: a threshold voltage of 0.25 V, a drain-source current on/off ratio of 105, a subthreshold gate voltage swing of 0.61 V/decade, and a high field-effect mobility of 61.5 cm2/V·s; these characteristics make it suitable for use as a switching transistor and in low-power applications.
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