Abstract
Thin films of niobium nitride with superconducting transition temperatures of 16 K have been deposited on commercial carbon fibers, sapphire, glass, and molybdenum without intentional heating by dc reactive magnetron sputtering. Two fiber transport chambers enable continuous coating of technical substrates. The effects of deposition conditions on the NbN formation, microstructure, resitivity, superconducting properties and on homogenenous coating of complex substrates have been studied with X-ray analysis, SEM, RBS and TEM. Small test coils have been fabricated.
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