Abstract
High electric fields are used for ion generation in gas field ion sources and liquid metal ion sources. With the preparation of stable microprotrusions on refractory metals stably emitting gas field ion sources for hydrogen and helium ions with angular intensities of 35 and 20 μA sr−1, respectively, they are available with a high chromatic angular intensity. Liquid metal ion sources can stably deliver a variety of ions with a source life in some cases over more than 1000 h. They are an essential element for patterning in the nanometer region and other focused ion beam applications.
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