Heating process analysis for microplate subjected to moving laser pulse source

Abstract

The moving laser pulse has been widely employed in microstructure processing and manufacturing, while its influence on the dynamic response of microplates is still unclear. This paper aims to propose a thermo-mechanical coupling model to reveal the transverse response of a microplate subjected to a three-dimensional (3D) moving laser heat source. Herein, not only the 3D heat conduction of the moving laser but also the size-dependent behavior of the microplate are taken into account, in which the former is described by the dual-phase-lag (DPL) heat transfer model and the latter is captured by using the modified couple stress theory. Firstly, the governing equations of the microplate are derived with the aid of Hamilton's principle, which are analytically solved by employing the Green's function method, and they are also validated by comparing with FE simulation and previous studies. Subsequently, influences of phase-lag parameters, pulse duration, laser moving speed and size-scale parameter on the thermo-dynamic response of microplate are examined. It is demonstrated that the size-scale parameter and pulse duration both can reduce the deflection amplitude of the microplate, while the effect of laser moving speed is coupled with the phase-lag parameters. The quantitative results obtained in this study can be adopted to deeply understand the heating process during the actual laser-assisted micro-manufacturing and to provide some effective guidelines on this process.