Abstract
A self-consistent nonlocal kinetic model has been established to investigate the electron heating mechanism in an one-dimensional bounded magnetized inductively coupled plasma (MICP) under low pressures. The interaction function of electrons with rf electric field and electron energy distribution function (EEDF) are determined by solving the linearized Boltzmann equation incorporating with the Maxwell equations. The numerical results show that the presence of the direct-current (dc) magnetic field plays an important role in the EEDF and high-energy electrons are efficiently heated by the Azbel–Kaner resonances under the anomalous skin-effect conditions.
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