Hardware and software systems for the determination of charged particle parameters in low pressure plasmas using impedance-tuned Langmuir probes

Abstract

A computer-controlled, impedance-tuned Langmuir probe data acquisition system and processing software package have been designed for the diagnostic study of low pressure plasmas. The combination of impedance-tuning and a wide range of applied potentials (± 100 V) provides a versatile system, applicable to a variety of analytical plasmas without significant modification. The automated probe system can be used to produce complete and undistorted current-voltage (i-V) curves with extremely low noise over the wide potential range. Based on these hardware and software systems, it is possible to determine all of the important charged particle parameters in a plasma; electron number density ( n e ), ion number density ( n i ), electron temperature ( T e ), electron energy distribution function (EEDF), and average electron energy (〈ε〉). The complete data acquisition system and evaluation software are described in detail. A LabView (National Instruments Corporation, Austin, TX) application program has been developed for the Apple Macintosh line of microcomputers to control all of the operational aspects of the Langmuir probe experiments. The description here is mainly focused on the design aspects of the acquisition system with the targets of extremely low noise and reduction of the influence of measurement noise in the calculation procedures. This is particularly important in the case of electron energy distribution functions where multiple derivatives are calculated from the obtained i-V curves. A separate C-language data processing program has been developed and is included here to allow the reader to evaluate data obtained with the described hardware, or any i-V data imported in tab separated variable format. Both of the software systems are included on a Macintosh formatted disk for their use in other laboratories desiring these capabilities.