Abstract

Except in the very early stage of the development of X-ray photoemission spectroscopy (XPS) by Kai Siegbahn and his coworkers, the excitation sources for XPS studies have predominantly been the Al Kα and Mg Kα emission lines. The advent of synchrotron radiation sources opened up the possibility of tuning the excitation photon energy with much higher throughputs for photoemission spectroscopy, however the excitation energy range was limited to the vacuum ultra violet and soft X-ray regions. Over the past 5–6 years, bulk-sensitive hard X-ray photoemission spectroscopy using high-brilliance high-flux X-rays from third generation synchrotron radiation facilities has been developed. This article reviews the history of HXPES covering the period from Kai Siegbahn and his coworkers’ pioneering works to the present, and describes the fundamental aspects, instrumentation, applications to solid state physics, applied physics, materials science, and industrial applications of HXPES. Finally, several challenging new developments which have been conducted at SPring-8 by collaborations among several groups are introduced.

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