Abstract
A hard x-ray microprobe with a grazing-incidence total-reflection mirror system is developed. The optical system has a pair of elliptical mirrors arranged in a crossed mirror geometry (Kirkpatrick–Baez configuration) and forms demagnified images of an x-ray source. A focused spot size of 3.5 μm×4.8 μm is obtained at a wavelength of 2.3 Å. A focusing test with an x-ray source determined by a pinhole generates a finer microbeam. Preliminary experiments on scanning x-ray microscopy are performed using the focused x-ray beam.
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