Abstract
Since the increasing concerns of the great harm to human and environment caused by H2S, to develop effective methods to detect this toxic and hazardous gas has become more and more important. The MEMS gas sensor is portable and gives a lower power waste than the general metal-oxide-semiconductor sensor. To fabricate this kind of instrument, the material with high gas sensitivity is needed. In this study, Ni doped CeO2 nanoparticles were prepared by using a simple hydrothermal reaction method andthe sensing mechanism of H2S on the surface of the material was studied by in situ IR. It proved that Ni doped CeO2 nanoparticles has a lower operating temperature than pure CeO2, and a certain amount of Ni doping in CeO2 has improved its gas sensitivity and selectivity a lot to H2S gas.The response of the MEMS gas sensor to 1 ppm H2S gas can reach to 1.47 at 200°C and it can even be used to detect 20 ppb H2S effectively. Figure 1
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