Abstract

The growth behavior of Pt crystallites vacuum-deposited on flat γ- and α-Al2O3 substrates was investigated by atomic force microscopy (AFM). In this study, we fabricated a thin layer of γ-Al2O3 on a planar sapphire (single crystalline α-Al2O3) substrate by Al+- and O+- ion implantation and annealing at 900 °C. AFM observation revealed that γ- and α-Al2O3 substrates have a negligible roughness compared with the size of the supported Pt crystallites deposited on them. The crystal structure was identified as a γ(111) plane for the γ-Al2O3 substrate, but an α(0001) plane for the sapphire substrate by Rutherford backscattering spectroscopy-channeling analysis (RBS-C) and X-ray diffraction analysis (XRD). We then observed the surface morphology of Pt crystallites on γ- and α-Al2O3 substrates, which were fabricated by sputtering of a Pt target. The as-deposited Pt thin film changed into Pt crystallites dispersed on the substrate with heat treatment at 800 °C in an oxidative atmosphere. It was found that the grow...

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