Abstract
Transmission electron microscopy and Auger electron spectroscopy revealed that the Ar+-ion bombardment of a carbon-containing molybdenum film with an amorphous structure led to the growth of carbide particles smaller than ∼30nm in diameter. The particles possessed an fcc structure and were distributed like islands in the film. Electron diffraction analysis identified them withβ-MoC0.75, a high-temperature phase of MoC0.75. Presumably, the heating effect of the ion beam was responsible for forming and stabilizing the particles.
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