Abstract
A method for obtaining diamond films using gas jet deposition with activation on extended surfaces made of tungsten heated up to high temperatures is considered in the article. The original reactor had been designed for activation of carbonaceous gas mixtures. A distinguishing feature of this method is to provide an extended interaction of hydrogen, methane, and its fragments with a heated tungsten surface. It is proposed to implement the increase of catalytic thermal dissociation of hydrogen molecules by providing multiple collisions during passage through the heated tungsten channels. In the researches carried out the effect of thermo-gas-dynamic parameters on resulting carbon structures had been studied. During the film deposition on the molybdenum surface, a strong dependence of the film morphology on the temperature of the tungsten surface was observed in the range of 2000–2150°C. As a result of conducted research next objectives has obtained: the optimal substrate temperature, the value of the pressure in the reaction zone, ways of minimizing the carburization of the activation surfaces were found.
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