Abstract

Molecular dynamics (MD) simulations were carried out of the energetic impact of C atoms on amorphous carbon (a-C) substrates in the energy range 10–500 eV. The results show that a densification of the deposited material occurs up to 150 eV energy but with a low sp 3 bond content. At 500 eV impact the substrate material shows a significant decrease in density and a porous a-C structure forms.

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