Abstract

(In + Nb) co-doped TiO2 (TINO) films with a rutile structure have been prepared on m-plane sapphire substrates using a pulsed laser deposition method. The film growth mode and the atomic-scale microstructure of the TINO/sapphire heterostructure have been investigated by advanced electron microscopy techniques. The crystallographic orientation relationship of (001)[010]rutile//(11¯00)[0001]sapphire between the TINO films and the m-plane sapphire substrates has been determined. Across the TINO/sapphire interface, Ti(In,Nb)O6−octahedra connect AlO6−octahedra through either edge-sharing or corner-sharing. Misfit dislocations appear at the TINO/sapphire interface and contribute to epitaxial strain relaxation in the heterosystem. Additionally, two types of twins, (011)[100] and (031)[100], form within the films. Cation segregation occurs at the twin boundary and the TINO grain boundary. The findings here may provide a better understanding of the growth behaviors of the (In + Nb) co-doped rutile TiO2 films prepared on other types of substrates.

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